Buku Ketenaganukliran
Process engineering analysis in semiconductor device fabrication
Much of the book includes recent material presented with a degree of integration and criticism not available in the original journal publications. Worked examples illustrate how one uses fundamental principles to model processes. Where possible, models are compared with experimental data, and the success and/or failure of a model is presented as a learning experience. In addition, an extensive set of problems offers an opportunity for the reader to be guided into directions beyond the scope of the book itself.
The two authors' vast combined experience in the fields of chemical engineering, process engineering, electrical engineering, and physics offers readers expert insight into as well as broad exposure to new areas of technology.
S17-0077 | 621.381.52 MID p | Perpustakaan Poltek Nuklir | Tersedia |
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